Tae-Gyoung Lee Park Young Ju Eun-Kyu Kim 2024-01-13T12:30:31Z 2024-01-13T12:30:31Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/106722 English Localized bond states and quantum size effect in SiNχ p-Si(100) thin films deposited by rf-reactive sputtering method Conference 1 The 11th Seoul International Symposium on the physics of Semiconductors and Applications-2002, pp.319 The 11th Seoul International Symposium on the physics of Semiconductors and Applications-2002 319 319 KO