J.K.Kim Park, Young Ju D.Byun E.K.Koh 2024-01-13T12:30:34Z 2024-01-13T12:30:34Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/106726 English H₂/N₂ mixing plasma pretreatment of sapphire for GaN deposition Conference 1 The 11th Seoul International Symposium on the Physics of Semiconductors and Applications-2002, pp.62 The 11th Seoul International Symposium on the Physics of Semiconductors and Applications-2002 62 62 KO