YOON JIN KOOK Byun Ji Young Kim Gyeung Ho Kim Jae Soo 2024-01-13T12:30:35Z 2024-01-13T12:30:35Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/106727 English Formation of MoSi₂-Si₃N₄ coatings on Mo substrate by CVD Conference 1 Golden Research Conference ; High Temperature Materials, Processes, and Diagnostics, pp.1071 - 1076 Golden Research Conference ; High Temperature Materials, Processes, and Diagnostics 1071 1076 US