최훈상 이종한 임건식 강민정 최인훈 Kim Yong Tae Kim Seong Il 2024-01-13T12:30:58Z 2024-01-13T12:30:58Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/106751 English 기판전극 MFM구조 강유전체 SBT박막 잔류분극 The effects of various bottom electrodes in MFM structure on the ferroelectric properties of SrBi2Nb2O9 thin films using RF magnetron sputtering Conference 1 Joint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA, pp.427 Joint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA 427 427 KO