S.F. Karmanenko A.I. Dekyk N.N. Isakov Oh Young-Jei V.I. Sakharov I.T. Serenkov 2024-01-13T12:31:24Z 2024-01-13T12:31:24Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/106779 English RF reactive sputtering Ion scattering Structual strains Cavity Influence of structural properties on RF and microwave characteristics of BaSrTiO ₃ films on various substrates. Conference 1 Proceedings of the 14th International Symposium on Integrated Ferroelectrics Proceedings of the 14th International Symposium on Integrated Ferroelectrics KO