JONG-YEON PARK Kun-Tae Kim 이준섭 LEE TAE HUN Kwon Gwang Min Shin Hyun Joon Moon Sung Wook PARK JEONG HO 2024-01-13T12:31:31Z 2024-01-13T12:31:31Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/106786 English MRPBI system UV-lithography IR sensor 3D MEMS antenna Fabrication of 3D MEMS antenna array structure for uncooled IR sensor using MRPBI system and plastic micromachining Conference 2 Proceedings of ICEE, pp.1444 - 1448 Proceedings of ICEE 1444 1448 KO