KIM DEOK HO KIM KYUNG HWAN 홍재완 2024-01-13T13:02:11Z 2024-01-13T13:02:11Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107094 English atomic force microscope(AFM) self-sensing MEMS cantilever nanomanipulation piezoresistive Implementation of a self-sensing MEMS cantilever for nanomanipulation 자기 검지식 MEMS 캔티레버를 이용한 나노매니퓰레이터 구현 Conference 2 제 4 회 MEMS 학술대회 논문집 = The 4th Korean MEMS Conference, pp.120 - 125 제 4 회 MEMS 학술대회 논문집 = The 4th Korean MEMS Conference 120 125 KO