JONG-YEON PARK Kuntae Kim KIM JINSEOK 한용희 Moon Sung Wook PARK JEONG HO 2024-01-13T13:02:18Z 2024-01-13T13:02:18Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107102 English MRPBI HARS(high aspect ratio structure) fabrication for 3D MEMS antenna array using novel photolithography apparatus Conference 2 한국반도체학술대회 논문집, pp.715 - 716 한국반도체학술대회 논문집 715 716 KO