심현상 심선일 Kim Yong Tae 2024-01-13T13:02:44Z 2024-01-13T13:02:44Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107130 English Electrical characteristics of Ir/atomic layer deposited ZrO ₂ /Si field effect transistors Conference 1 2002 Materials Research Society Fall Meeting Abstracts, pp.336 2002 Materials Research Society Fall Meeting Abstracts 336 336 US