임근식 최훈상 이종한 Kim Yong Tae Kim Seong Il 최인훈 2024-01-13T13:03:10Z 2024-01-13T13:03:10Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107157 English Structural and electrical characteristics of ZrO ₂ as a gate dielectric and buffer layer grown by RF magnetron sputtering Conference 1 AVS 49th International Symposium, Colorado Convention Center Denver AVS 49th International Symposium, Colorado Convention Center Denver US