Kang, Ji Yoon KIM HYUNG JOON Kim Tae Song 2024-01-13T13:03:48Z 2024-01-13T13:03:48Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107197 English PZT cantilever biochip Design of microcantilever for a biosensor Conference 1 2002 ASME International Mechanical Engineering Congress & Exposition (IMECE 2002), pp.1 - 4 2002 ASME International Mechanical Engineering Congress & Exposition (IMECE 2002) 1 4 US