KIM IN TAY 박윤권 김용국 LEE YUN HI Lee Jeon Kook 김남수 Ju Byeong Kwon 2024-01-13T13:04:03Z 2024-01-13T13:04:03Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107214 English Flexible MEMS thin wafer FBAR Design and fabrication of film bulk acoustic wave resonator 압전박막공진기 설계 및 제작 Conference 2 SENSORS CONFERENCE 2002, pp.48 - 51 SENSORS CONFERENCE 2002 48 51 KO