임건자 김태은 Kim Joosun Lee Jong Ho Lee Hae-Weon 2024-01-13T13:31:20Z 2024-01-13T13:31:20Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107308 English nano-crystalline CeO ₂ Development of ceria-based slurry with high selectivity for STI CMP Conference 2 Asia International Conference on Tribology 2002 Asia International Conference on Tribology 2002 KO