HAN SUNG HAN 안창규 최승철 2024-01-13T14:00:20Z 2024-01-13T14:00:20Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107513 English AIN MOCVD single precursor c-axis oriented Deposition of aluminum nitride thin film by MOCVD using AlCl₃ : BuNH₂ single source precursor Conference 1 Proceedings of 14th International Symposium on the Photo Chemistry and Photophysics of Coordination, pp.? Proceedings of 14th International Symposium on the Photo Chemistry and Photophysics of Coordination ? JA