Yohan Sun Se-Young Seo Jung Hoon Shin Tae Gon Kim Cheong Nam Whang SONG JONG HAN 2024-01-13T14:01:48Z 2024-01-13T14:01:48Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107606 English PE-CVD Ion beam enhanced formation and luminescence of Si Nanoclusters from α -Sio// χ Conference 1 Mat. Res. Soc. Symp. Proc., v.647 Mat. Res. Soc. Symp. Proc. 647 US