CHOI CHANG HOON 박호영 NAM SANG CHUL Yoon Young Soo Cho Won Il Cho Byung Won Yun Kyung Suk 탁용석 2024-01-13T14:03:56Z 2024-01-13T14:03:56Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107746 English lithium phosphorous Oxy Nitride(lipon) thin film battery Effect of RF sputtering power in Lipon solid electrolyte ionic conductivity for thin film lithium rechargeable microbatteries Lithium phosphorous oxy nitride(Lipon) 고체전해질 박막의 이온전도도에 미치는 RF sputtering power 의 효과 Conference 2 한국전기화학회 학술발표회 초록집 한국전기화학회 학술발표회 초록집 KO