임재홍 CHOI DOO JIN 김한기 Cho Won Il Yoon Young Soo 2024-01-13T14:04:17Z 2024-01-13T14:04:17Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107768 English Effects of excess oxygen on the properties of sputtered RuO₂ thin film supercapacitor Conference 2 1st Intelligent Microsystem Symposium, pp.142 - 145 1st Intelligent Microsystem Symposium 142 145 KO