김동준 심현상 박종완 Kim Yong Tae Kim Seong Il KIM CHUN KEUN 2024-01-13T14:04:26Z 2024-01-13T14:04:26Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107778 English HSQ Correlation between surface modification of HSQ films and phase transformation of Cu/W-N bilayers deposition on the NH3 plasma treated HSQ films Conference 1 Material Research Society (MRS) 2001 spring Meeting, pp.231. Material Research Society (MRS) 2001 spring Meeting 231. 231. US