Ahn Kwang-Duk KANG JONG HEE Han Dong Keun 김준영 하성현 2024-01-13T14:32:33Z 2024-01-13T14:32:33Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107919 English New antireflective coating materials for high resolution imaging in deep UV microlithography Conference 2 The Korean-Japan Joint Symposium on Imaging Materials and Technology 2001, pp.15 - 17. The Korean-Japan Joint Symposium on Imaging Materials and Technology 2001 15 17. KO