JONG-YEON PARK Kun-Tae Kim Moon Sung Wook PARK JEONG HO 2024-01-13T14:32:48Z 2024-01-13T14:32:48Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/107935 English MRPBI system UV-lithography IR sensor 3D MEMS antenna Fabrication of 3D feed horn shape MEMS antenna array using MRPBI (mirror reflected parallel beam illuminator) system with an ultra-slow-rotated and inclined X-Y-Z stage Conference 1 Proceedings of MRS, v.687, pp.113 - 124 Proceedings of MRS 687 113 124 US