Yun-Kwon Park Heung-Woo Park Duck-Jung Lee Jung-Ho Park Chung-Woo Kim Ci-Moo Song Chul-Ju Kim Ju Byeong Kwon 2024-01-13T14:34:04Z 2024-01-13T14:34:04Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108015 English RF-MEMS RF-MEMS package with vertical via hole for low loss characteristic Conference 2 Proceedings of the International Sensor Conference 2001, pp.247 - 248. Proceedings of the International Sensor Conference 2001 247 248. KO