KWON YOUNG AH 채경수 Jongyong Kim 정대석 Park Jong Oh OH MYUNG HWAN Moon Sung Wook 2024-01-13T14:34:17Z 2024-01-13T14:34:17Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108029 English PMER UV-LIGA negative photoresist Negative PMER as a novel mold material for UV-LIGA process Conference 2 Proceedings of the International Sensor Conference 2001, pp.217 - 218 Proceedings of the International Sensor Conference 2001 217 218 KO