이정훈 윤기현 Kim Tae Song 2024-01-13T15:00:39Z 2024-01-13T15:00:39Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108058 English PZT Electromechanical characterization of micromachined PZT cantilever Conference 2 Proceedings of the International Sensor Conference 2001, pp.43 - 44 Proceedings of the International Sensor Conference 2001 43 44 KO