KIM IN TAY 김희영 이시형 이성준 김형동 Lee Jeon Kook 김남수 Ju Byeong Kwon 2024-01-13T15:02:27Z 2024-01-13T15:02:27Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108158 English thin-film bulk acoustic wave resonator RF design RF sputtering AlN Design and fabrication of thin-film bulk acoustic resonator Conference 2 Proceeding of International Sensor Conference 2001, pp.261 - 262 Proceeding of International Sensor Conference 2001 261 262 KO