채경수 한승오 송민석 Moon Sung Wook PARK JEONG HO 2024-01-13T15:03:06Z 2024-01-13T15:03:06Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108195 English mechanical inverter MEMS micromechanical switch electrostatic actuator surface micromachining Design and fabrication of a micromechanical inverter Conference 1 Proceedings of SPIE-Micromachining and Microfabrication Process Technology VI, v.4174, pp.508 - 514 Proceedings of SPIE-Micromachining and Microfabrication Process Technology VI 4174 508 514 US