Ju Byeong Kwon 박흥우 이덕중 PARK JEONG HO OH MYUNG HWAN 2024-01-13T15:03:26Z 2024-01-13T15:03:26Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108215 English MEMS Surface-micromachined vacuum magnetic field sensors Conference 1 IVMC'2000, pp.? IVMC'2000 ? ? CC