심현상 김동준 Kim Yong Tae 전형탁 PARK YOUNG KYUN Kim Seong Il 2024-01-13T15:31:26Z 2024-01-13T15:31:26Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108365 English cyclic exposure Digital deposition of tungsten nitride thin layer by cyclic exposure of WF//6 and NH₃ Conference 1 The International Conference on Electrical Engineering 2000, pp.774 - 777 The International Conference on Electrical Engineering 2000 774 777 JA