Ju Byeong Kwon 박흥우 이덕중 SON YONG BAE PARK JEONG HO OH MYUNG HWAN 2024-01-13T15:33:02Z 2024-01-13T15:33:02Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108461 English MEMS Vacuum packaging and operating properties of micro-tunneling sensors Conference 2 5th ISMP, pp.110 5th ISMP 110 110 KO