안창규 최승철 CHO SEONG HOON HAN SUNG HAN 경제홍 2024-01-13T16:00:44Z 2024-01-13T16:00:44Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108602 English MOCVD AlN single precusor MOCVD deposition of AlN thin film for packaging materials Conference 2 마이크로전자 및 패키징학회지, v.7, no.1, pp.13 마이크로전자 및 패키징학회지 7 1 13 13 KO