K.H. Park Y. Kim T.H. Chung H.J. Bark J.Y. Yi CHOI WON CHEOL KIM EUN KYU 2024-01-13T16:02:32Z 2024-01-13T16:02:32Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108715 English nanocrystal Si ion-beam-assisted electron beam deposition TEM Electrical and structural properties of Si nanocrystals prepared by ion-beam-assisted electron beam deposition Conference 1 Abstracts of 10th Seoul Inter. Symp. on Phys. of semicon. and Appl., pp.149 Abstracts of 10th Seoul Inter. Symp. on Phys. of semicon. and Appl. 149 149 KO