SEO SANG WON KIM HOON 박종원 LEE YUN HI 박공석 Jung Jae Hoon 장진 김동호 OH MYUNG HWAN 김남수 Ju Byeong Kwon KIM HOON 2024-01-13T16:02:34Z 2024-01-13T16:02:34Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108717 English etched feature thin chromium film substrate temperature Effect of substrate temperature on etched feature of thin chromium film and its application Conference 2 ISPSA 2000, pp.197 ISPSA 2000 197 197 KO