김현호 이시형 Lee Jeon Kook OH MYUNG HWAN KIM SOO WON Ju Byeong Kwon 2024-01-13T16:02:54Z 2024-01-13T16:02:54Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108737 English aluminum nitride (AlN) The fabrication of the suspended thin film resonator(STFR) using AlN piezoelectric AlN 압전체를 이용한 suspended 압전박막공진기의 제조 Conference 2 센서학회 종합학술대회 = Sensors Conference 2000, pp.13 - 16 센서학회 종합학술대회 = Sensors Conference 2000 13 16 KO