심현상 김동준 Kim Yong Tae 전형탁 2024-01-13T16:31:18Z 2024-01-13T16:31:18Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108905 English atomic layer deposition tungsten nitride cyclic CVD Digital deposition of tungsten nitride thin layer by sequential exposure of tung sten hexafluoride and ammonia Conference 2 제7회 한국반도체학술대회 논문집 = The 7th Korean Conference on Semiconductors, pp.481 - 482 제7회 한국반도체학술대회 논문집 = The 7th Korean Conference on Semiconductors 481 482 KO