Chang-Min Park 최범호 현찬경 KIM EUN KYU 황성우 2024-01-13T16:31:24Z 2024-01-13T16:31:24Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/108911 English nano-mold A 40 nm nano-mold lithography Conference 2 Proc. 7th Korean Conf. on Semiconductors = 제 7 회 한국반도체 학술대회, pp.321 - 322 Proc. 7th Korean Conf. on Semiconductors = 제 7 회 한국반도체 학술대회 321 322 KO