박흥우 Ju Byeong Kwon 박윤권 김철주 OH MYUNG HWAN 2024-01-13T16:34:28Z 2024-01-13T16:34:28Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/109100 English FED FEA MEMS Micro-tunneling sensors for vacuum level evaluation of field emission display devices Conference 1 IVMC '99, pp.340 - 341 IVMC '99 340 341 GW