주성재 임승현 CHOI WON CHEOL KIM EUN KYU 윤의준 Denise C. Marra Eray S. Aydil 2024-01-13T17:03:20Z 2024-01-13T17:03:20Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/109295 English ECR-CVD Visible photoluminescence from a-Si:H films grown by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition Conference 1 Abstracts of MRS 1999 Spring Meeting, pp.95 Abstracts of MRS 1999 Spring Meeting 95 95 US