Yoon Young Soo Cho Won Il 전은정 NAM SANG CHUL 신영화 2024-01-13T17:03:43Z 2024-01-13T17:03:43Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/109320 English micro-battery MEMS secondary battery thin film battery vanadium oxide cathode half-cell microelectronics A study on thin film secondary battery for microelectromechanical system device Microelectromechanical system 소자를 위한 박막형 2차 전지에 관한 연구 Conference 2 1999 제1회 MEMS 학술대회 논문집 = 1999 Proceedings of the 1st Korean MEMS Conference, pp.91 - 97 1999 제1회 MEMS 학술대회 논문집 = 1999 Proceedings of the 1st Korean MEMS Conference 91 97 KO