박흥우 Ju Byeong Kwon 박윤권 김철주 OH MYUNG HWAN 2024-01-13T17:03:45Z 2024-01-13T17:03:45Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/109322 English FEA FED MEMS poly-Si emitter vacuum sensor cantilver field emission lift-off Micro-tunneling sensor for vacuum level evaluation of field emission display Conference 2 1999 제1회 MEMS 학술대회 논문집 = 1999 Proceedings of the 1st Korean MEMS Conference, pp.255 - 258 1999 제1회 MEMS 학술대회 논문집 = 1999 Proceedings of the 1st Korean MEMS Conference 255 258 KO