현찬경 최승철 황성우 KIM YOUN KIM EUN KYU 2024-01-13T17:30:58Z 2024-01-13T17:30:58Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/109419 English nanometer Nanometer scale patterning by cantilever-oscillating Atomic Force Microscope (AFM) Conference 2 제 6 회 한국반도체학술대회 논문집, pp.47 - 48 제 6 회 한국반도체학술대회 논문집 47 48 KO