PARK CHUL WOO KIM MIN CHEOL KANG HO KWAN Moon Sung Wook OH MYUNG HWAN 정홍배 2024-01-13T17:33:02Z 2024-01-13T17:33:02Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/109547 English 열산화법 sputtering법 산화 바나듐 박막 특성비교 sputtering oxidation TCR A comparative study for the characteristics of VOx thin films fabricated by thermal oxidation and sputtering methods 열산화법 및 sputtering법으로 제조된 산화 바나듐 박막의 특성 비교 Conference 2 센서학회지, v.10, no.1, pp.363 - 367 센서학회지 10 1 363 367 KO