박윤권 Ju Byeong Kwon 박흥우 Yoon Young Soo Sang-Seop Yom Oh Young-Jei PARK JEONG HO SUH SANG HEE OH MYUNG HWAN 김철주 2024-01-13T18:00:48Z 2024-01-13T18:00:48Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/109671 English thermally isolating membrane uncooled IR-sensor direct bonding pyroelectirc thin film square-shaped structure silicon substrate sacribicial layer Fabrication of un-cooled infrared sensor using pyroelectric thin film Conference 1 Conference on Device and Process Technologies for MEMS and Microelectronics, v.3892 (SPIE), pp.356 - 363 Conference on Device and Process Technologies for MEMS and Microelectronics 3892 (SPIE) 356 363 KO