최우범 Ju Byeong Kwon LEE YUN HI 정지원 OH MYUNG HWAN 정성재 LEE NAM YANG 한정인 조경익 성만영 2024-01-13T18:33:32Z 2024-01-13T18:33:32Z 2021-09-29 0098-0966 https://pubs.kist.re.kr/handle/201004/110111 English MEMS In-situ vacuum packaging method for FEDs in ultra-high-vacuum chamber Conference 1 Proc. SID '98, pp.593 - 596 Proc. SID '98 593 596 US