이석형 김동준 양성훈 박정원 손세일 오경희 Kim Yong Tae 박종완 2024-01-13T18:34:25Z 2024-01-13T18:34:25Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/110172 English Low-K Reliability of Cu/W-N thin films deposited on low dielectric constant SiO:F ILD Conference 1 MRS 98', pp.? MRS 98' ? ? US