Steven R. Sakamoto Cem Ozturk Byun Young Tae Jack Ko Nadir Dagli 2024-01-13T19:01:11Z 2024-01-13T19:01:11Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/110231 English SUR optical waveguides benzocyclobutene Gats substrate set spray etch propagation loss Substrate-removed (SURE) optical waveguides in GaAs/AlGaAs epitaxial layers embedded in benzocyclobutene (BCB) Conference 1 Integrated Photonics Research 1998 : Technical Digest Series, v.4, pp.79 - 81 Integrated Photonics Research 1998 : Technical Digest Series 4 79 81 US