Lee Youn-Woo 이경환 Lim Jong Sung Kim Jae Duck LEE YOUN YONG 2024-01-13T19:31:53Z 2024-01-13T19:31:53Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/110545 English 반도체용가스 사불화메탄 CF₄ synthesis by fluorination of CF₂Cl₂ and CCl₄ CF₂ Cl₂와 CCl₄의 불화에 의한 CF₄의 합성 Conference 2 Theories and Applications of Chem. Eng., v.4, no.1, pp.317 - 320 Theories and Applications of Chem. Eng. 4 1 317 320 KO