김동준 Kim Yong Tae 박종완 2024-01-13T20:02:57Z 2024-01-13T20:02:57Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/110867 English Ta-Si-N thin film Effects of nitrogen on preventing the crystallization of amorphous Ta-Si-N diffusion barrier Conference 1 1997 MRS spring meeting, San Francisco, pp.185 1997 MRS spring meeting, San Francisco 185 185 US