Hong Kyu Jang CHOI WON-KOOK KOH SEOK KEUN K. H. Kim D. J. Choi S. Han S. C. Choi 정형진 2024-01-13T20:33:25Z 2024-01-13T20:33:25Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/111163 English thermal stability Thermal stability of Cu films on TiN/Ti/Si(100) by partially ionized beam deposition Conference 1 Mat. res. soc. symp. proc., v.438, pp.387 - ? Mat. res. soc. symp. proc. 438 387 ? US A1997BH43C00057