Yoon Young Soo Joon Han Kim T.H. Lim U.A. Bonne A.M. Schmidt D.L. Polla 2024-01-13T20:34:40Z 2024-01-13T20:34:40Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/111244 English MEMS PZT film micromaching Fabrication processes and characteristics of microelectromechanical system using PZT films Conference 1 Mat. Res. Soc. Symp. Proc., v.444, pp.143 - 148 Mat. Res. Soc. Symp. Proc. 444 143 148 US