안강호 Bae Gwi-Nam Chun-Sik Lee 2024-01-13T21:02:07Z 2024-01-13T21:02:07Z 2021-09-29 https://pubs.kist.re.kr/handle/201004/111344 English particle deposition velocity rotating wafer rotatingspeed Particle deposition velocities on a rotating wafer Conference 1 Proceedings of the 13th international symposium on contamination control., pp.465 - 469 Proceedings of the 13th international symposium on contamination control. 465 469 KO