<?xml version="1.0" encoding="utf-8" standalone="no"?>
<dublin_core schema="dc">
<dcvalue element="contributor" qualifier="author">Ju&#x20;Byeong&#x20;Kwon</dcvalue>
<dcvalue element="contributor" qualifier="author">OH&#x20;MYUNG&#x20;HWAN</dcvalue>
<dcvalue element="contributor" qualifier="author">S.&#x20;J.&#x20;Lee</dcvalue>
<dcvalue element="contributor" qualifier="author">S.&#x20;N.&#x20;Lee</dcvalue>
<dcvalue element="contributor" qualifier="author">S.&#x20;W.&#x20;Lee</dcvalue>
<dcvalue element="contributor" qualifier="author">D.&#x20;Jeon</dcvalue>
<dcvalue element="contributor" qualifier="author">K.&#x20;R.&#x20;Lee</dcvalue>
<dcvalue element="date" qualifier="accessioned">2024-01-13T21:02:41Z</dcvalue>
<dcvalue element="date" qualifier="available">2024-01-13T21:02:41Z</dcvalue>
<dcvalue element="date" qualifier="created">2021-09-29</dcvalue>
<dcvalue element="identifier" qualifier="uri">https:&#x2F;&#x2F;pubs.kist.re.kr&#x2F;handle&#x2F;201004&#x2F;111377</dcvalue>
<dcvalue element="language" qualifier="none">English</dcvalue>
<dcvalue element="subject" qualifier="none">field&#x20;emitter</dcvalue>
<dcvalue element="subject" qualifier="none">field&#x20;emission&#x20;display</dcvalue>
<dcvalue element="subject" qualifier="none">micromachining</dcvalue>
<dcvalue element="subject" qualifier="none">diamond-coated&#x20;silicon&#x20;tip</dcvalue>
<dcvalue element="title" qualifier="none">Fabrication&#x20;of&#x20;self-aligned&#x20;silicon&#x20;field&#x20;emitters&#x20;coated&#x20;with&#x20;diamond-like&#x20;carbon</dcvalue>
<dcvalue element="type" qualifier="none">Conference</dcvalue>
<dcvalue element="description" qualifier="journalClass">1</dcvalue>
<dcvalue element="identifier" qualifier="bibliographicCitation">Technical&#x20;digest&#x20;of&#x20;9th&#x20;international&#x20;vacuum&#x20;microelectronics&#x20;conference,&#x20;St.&#x20;Petersburg,&#x20;Russia.,&#x20;pp.283&#x20;-&#x20;287</dcvalue>
<dcvalue element="citation" qualifier="title">Technical&#x20;digest&#x20;of&#x20;9th&#x20;international&#x20;vacuum&#x20;microelectronics&#x20;conference,&#x20;St.&#x20;Petersburg,&#x20;Russia.</dcvalue>
<dcvalue element="citation" qualifier="startPage">283</dcvalue>
<dcvalue element="citation" qualifier="endPage">287</dcvalue>
<dcvalue element="citation" qualifier="conferencePlace">KO</dcvalue>
</dublin_core>
